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Tuesday, June 26th
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08:00 - 09:00
Registration
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09:00 - 09:20
Opening Ceremony
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TuMP
Room: Auditorium
Chair: to be confirmed
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09:20 - 11:00
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Fabrication,integration and packaging
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TuM1
Room: Auditorium
Chair: Robert Plana
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(INVITED) RF-MEMS Technology Platforms in Europe
H. Tilmans
Mechanical and Electrical Characterization of Benzocyclobutene Membrane Packaging
S. Seok, N. Rolland, P.A. Rolland
Co-integration of Highly Tunable MEMS Capacitor and High Quality Factor AlSi Inductors
A. Mehdaoui, C. Fillit, D. Tsamados, R.Y. Fillit, C. Billard, P. Ancey, A.M. Ionescu
GaAs Membrane-supported 60 GHz Receiver with Yagi-Uda Antenna
D Neculoiu, G Konstantinidis, T Vähä-Heikkilä, A Müller, D Vasilache, A Stavinidris, L Bary, M Dragoman, I Petrini, C Buiculescu, Z Hazoupulos, N Kornilios, P Pursula, R Plana, D Dascalu
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11:00 - 11:20
Coffee-break
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11:20 - 13:00
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MEMS switch and switch applications
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TuM2
Room: Auditorium
Chair: Flavio Giacomozzi
CoChair: Alexandru Muller
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Deep-reactive-ion-etched 3D Transmission Lines with Integrated Mechanically Multi-stable SPST and SPDT RF MEMS Switches
M. Sterner, N. Roxhed, G. Stemme, J. Oberhammer
RF-MEMS Switch for W-Band Applications.
A. Stehle, V. Ziegler, B. Schönlinner, U. Prechtel, H. Seidel, U. Schmid
RF MEMS Matrices for Space Applications
S. Catoni, S. Di Nardo, P. Farinelli, F. Giacomozzi, G. Mannocchi, R. Marcelli, B. Margesin, P. Mezzanotte, V. Mulloni, D. Pochesci, R. Sorrentino, F. Vitulli, L. Vietzorreck
An Improved Reliability Switching Network Design based on DC Contact MEMS Switches dedicated to Swithing Matrix Applications
M. El Khatib, A. Pothier, A. Crunteanu, O. Vendier, J.L. Cazaux, P. Blondy
A Novel Structure of RF MEMS Capacitive Series Switch for Avoiding Power Induced Stiction
JD Martinez, P Blondy, A Pothier, D Bouyge, A Crunteanu, M Chatras
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13:00 - 14:20
Lunch
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14:20 - 15:20
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BAW,FBAR and applications
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TuA1
Room: Auditorium
Chair: Harrie Tilmans
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(INVITED) BAW Technologies: Overview for Wireless Communication Systems and Potential Impact on the Next RF Architectures
E. Kerherve, A. Shirakawa, A. Volatier, P. Ancey
FBAR Overtone–based Oscillators using 90 nm CMOS
M. ElBarkouky, P. Wambacq, Y. Rolain
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15:20 - 16:20
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Interactive poster Session (I)
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TuA2
Room: Auditorium
Chair: David Girbau
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MEMS Reconfigurable Inset-Fed Patch Antenna Inherently Matched Over a Wide Frequency Range
P. Arcioni, L. Perregrini, G. Conciauro
Pyramidal Circularly Polarized Antenna with RF-MEMS Switches for Frequency Flexibility
S. Hebib, H. Aubert, O. Pascal, N. J.G. Fonseca, L. Ries, J.M. E.López
Design and Realization of a MEMS-tuned Reflectarray on LTCC Substrate
J. Perruisseau-Carrier, H. Legay, J. Lenkkeri, J-P. Polizzi, E. Jung, A.K. Skrivervik
MEMS Reconfigurable Patch Antenna Analysis Using WIPL-D
C. Medeiros, J. Costa, C. Fernandes, B. Kolundzija
A Dual-Gap Tunable RF MEMS Capacitor for Reflectarray Applications
G. Lissorgues, F. Flourens, A. Phommahaxay, F. Marty, L. Rousseau, C. Papon, P. Nicole, T. Dousset
Modified Ladder-type BAW Filter for an Out-of-band Rejection Improvement
J. Verdú, O. Menéndez, P. de Paco
Integrated Transformers for RF Applications. Analysis of the Width of Tracks
Y. Sanchez, A. Beriain, I. Cendoya, I. Sancho, J. Melendez, I. Gutierrez
Design and Characterization of a Bulk-acoustic-resonator (FBAR)
H. Campanella, A. Uranga, P. Nouet, N. Barniol, L. Terés, J. Esteve
Epitaxial AlN Thin Films for RF Applications
J.C. Moreno, F. Semond, E. Frayssinet, J. Massies, R. Vélard, X. Gagnard
Planar Spiral Inductors with MEMS Technology
E.U. Temocin, H.I. Atasoy, M. Unlu, K. Topalli, I. Istanbulluoglu, O. Bayraktar, S. Demir, O.A. Civi, S. Koc, T. Akin
Microfabrication of High Frequency Coaxial Cable using SU8 Photoresist
ML Ke, Y Wang, JF Zhou, K Jiang, MJ Lancaster
Dimensioning of Electromagnetic Couplers for 0-level Packaged Microwave Power Limiters based on Electron Emitter Array
A. Phommahaxay, G. Lissorgues, L. Rousseau, T. Bourouina, P. Nicole
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16:00 - 16:20
Coffee-break
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16:20 - 18:20
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MEMS reconfigurable antennas
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TuA3
Room: Auditorium
Chair: Anders Rydberg
CoChair: Luis Jofre
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(INVITED) MEMS Reconfigurable Antennas
A. Skrivervik, J. Perruisseau-Carrier
(INVITED)Towards Multifunctional MEMS-pixeled Antennas
F. De Flaviis, A. Grau, M. Lee, C.W. Jung, J. Romeu, G.P. Li, L. Jofre
Design and Realization of a MEMS Tuneable Reflectarray for Mm-wave Imaging Application
B. Mencagli, P. Farinelli, L. Marcaccioli, R. Vincenti Gatti, B. Margesin, F. Giacomozzi, R. Sorrentino
Monolithically Integrated MEMS Phased Array
K. Topalli, O. Aydin Civi, S. Demir, S. Koc, T. Akin
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20:00 - 22:00
Memswave Conference Social Dinner
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Wednesday, June 27th
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09:00 - 10:20
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MEMS resonators
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WeM1
Room: Auditorium
Chair: Volker Ziegler
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Vibrating RF MEMS - Oscillators and Beyond
J.R. Clark, W. Hsu
RF NEMS- Carbon-Nanotube Based Nanoelectromechanical Systems for Microwave and Millimeter Wave Applications
M Dragoman, A Cismaru, A.A Muller, D Dragoman, H Hartnagel, R Plana
Tuning Beam Electromechanical Resonators
F. Casset, C. Durand, P. Ancey, M. Aïd, L. Buchaillot
Towards a Tunable VHF Fully Integrated MEMS- MIXLER
A. Uranga, J. Verd, J.L López, J. Teva, G. Abadal, F. Torres, J. Esteve, F. Pérez-Murano, N. Barniol
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10:20 - 10:40
Coffee-break
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10:40 - 12:00
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MEMS reconfigurable circuits (I).Focused on filters
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WeM2
Room: Auditorium
Chair: Roberto Sorrentino
CoChair: Fabio Coccetti
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Design of a 2-Pole Digitally Tunable RF MEMS Filter Based on a Hybrid Simulation Approach
M. Houssini, A. Pothier, p. Blondy, A. Crunteanu, P. Tristant
Tunable Bandstop MEMS Filters for Ka and V-band Applications
A. Takacs, D. Neculoiu, D. Vasilache, A. Muller, P. Pons, L. Bary, P. Calmon, R. Plana, H. Aubert
Novell Micromachined Lumped Element Bandpass Filter with an Additional Zero in the Bandstop, for WLAN 5200 Applications
A.A Muller, D Neculoiu, D Vasilache, A Cismaru, P Pons, R Plana, L Bary, A Muller
Mechanically Tunable RF Filters: from a MEMS Perspective
W. Yan, R. Mansour
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12:00 - 13:00
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MEMS reconfigurable circuits (II)
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WeM3
Room: Auditorium
Chair: Roberto Sorrentino
CoChair: Fabio Coccetti
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MEMS Switches with Stepped Pull-Down Voltage for Tunable Phase Shifters
P. Farinelli, V. Leus, A. Ocera, B. Margesin, D. Elata, R. Sorrentino
RF-MEMS based 2-bit Reflective Phase Shifter at X-Band for Reconfigurable Reflect-array Antennas
C. Siegel, V. Ziegler, B. Schönlinner, U. Prechtel, H. Schumacher
Double Stub and Triple Stub RF MEMS Impedance Tuners
M Unlu, H.I. Atasoy, S. Demir, O.A. Civi, S. Koc, T. Akin
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13:00 - 14:20
Lunch
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14:20 - 15:00
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RF MEMS modeling, simulation and reliability
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WeA1
Room: Auditorium
Chair: Tauno Vähä-Heikkilä
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Charging Processes in RF-MEMS Capacitive Switches with SiO2 Dielectric
G Papaioannou, F Giacomozzi, E Papandreou, B Margesin
Dielectric Material Charging and ESD stress of AlN-based Capacitive RF MEMS
J. Ruan, N. Nolhier, M. Bafleur, L. Bary, N. Mauran, F. Coccetti, T. Lisec, R. Plana
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15:00 - 16:00
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Interactive Poster Session (II)
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WeA2
Room: Auditorium
Chair: Ignacio Llamas
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Series and Shunt RF MEMS Switches with Dielectric Membrane for WPAN Ad Hoc Networks
A. Boé, M. Fryziel, N. Deparis, C. Loyez, L. Le Garrec, N. Rolland, P.-A Rolland
A Design For 24GHz SPDT Using A Single RF MEMS Switch Based On A Totally Free Flexible Membrane.
R. Robin, L. Le Garrec, K. Segueni, O. Millet, L. Buchaillot
RF-MEMS Manufacturing Process on GaAs Substrate Fully Compatible with MMICs.
F. Cherubini, P. Farinelli, A. Ocera, S. Lavanga, L. Venturelli, C. Lanzieri, A. Cetronio, R. Sorrentino
Novel Compact MEMS-Tunable Directional Coupler for Dual Band Wireless Applications
A. Ocera, P. Farinelli, F. Cherubini, P. Mezzanotte, R. Sorrentino, B. Margesin, F. Giacomozzi
Design and Fabrication of RF MEMS Shunt Switches with High Isolation
X.L. Evans, N. Mitchell, P.V. Rainey, H.S. Gamble, N.B. Buchanan, V.F. Fusco
Novel Microstrip Distributed RF MEMS Phase Shifters for Phased Array Applications
V Janardhana, S Pamidighantam, RG Kulkarni, JS Roy
Microwave Narrowband Filters using Single and Stacked Coaxial Lines
A Jaimes-Vera , I Llamas-Garro , A Corona-Chavez , I Zaldivar-Huerta
Distibuted Parametric Simulation of Complex Electromagnetic Structures in Grid Computing Environment
F. Khalil, H. Aubert, F. Coccetti, R. Plana, T. Vähä-Heikkilä, T. Lisec
Reduction of sticking effect in micro-switch by restoring force enhancement
H ACHKAR, D PEYROU, F PENNEC, P PONS, R PLANA, M SARTOR
AFM Analysis of Dielectric Charging for MEMS Capacitive Switches Reliability
M. Lamhamdi, A. Belarni, P. Pons, L. Boudou, J. Guastavino, Y. Segui, M. Dilhan, R. Plana
Electrothermally-actuated RF-MEMS devices manufactured on a low-resistivity substrate
D. Girbau, Ll. Pradell, M.A. Llamas, A. Lázaro, A. Nebot
Effect of Contact Force between Rough Surfaces on Real Contact Area and Electrical Contact Resistance
D. Peyrou, F. Pennec, H. Achkar, P. Pons, R. Plana
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15:40 - 16:00
Coffee-break
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16:00 - 18:10
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RF MEMS Prospective
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WeA3
Room: Auditorium
Chair: Jérémie Bouchaud
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RF MEMS Roadmap
J. Bouchaud, B. Knoblich, H. Tilmans, F. Coccetti, A. El-Fatatry
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16:20 - 18:10
Panel Session:
"RFMEMS:enabled future applications"
Moderator: J.Bouchaud (WTC)
Participants: G. Fischer(Alcatel-Lucent),
V. Ziegler (EADS),H. J. de los Santos (NanoMEMS),
F. Casset (STm), J. Muntanyà (Baolab)
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18:10 - 18:30
Closing
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