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27/6/2007 14:20 - 15:00
RF MEMS modeling, simulation and reliability
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WeA1
Room: Auditorium
Chair: Tauno Vähä-Heikkilä
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Charging Processes in RF-MEMS Capacitive Switches with SiO2 Dielectric
G Papaioannou, F Giacomozzi, E Papandreou, B Margesin
Dielectric Material Charging and ESD stress of AlN-based Capacitive RF MEMS
J. Ruan, N. Nolhier, M. Bafleur, L. Bary, N. Mauran, F. Coccetti, T. Lisec, R. Plana
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